Ion Etch Rate Films Tantalum Pentoxide on Tantalum Films – BCR 261 (Ta2O5 on Ta metal, 4 pieces 30 nm thick, 4 pieces 100 nm thick) From Sigma-Aldrich in USA: BCR 261 Ta2O5 Standard (8 pieces) for Ion Etch Rate Measurement https://www.sigmaaldrich.com/catalog/product/sial/bcr261t?lang=en®ion=US From Joint Research Center in Belgium: BCR 261 Ta2O5 Standard (8 […]