Sample Degradation due to Argon Ion Etching

Degradation of PET (Mylar TM) occurs in less than 5 seconds using 1 kV Ar+ beam

Degradation of HfO2 and TiO2 by 1 kV Argon Ion Beam

Al2O3 does not readily degrade using a 1 kV Argon Ion Beam

Ta2O5 which is often used to Check Ion Etching Rate suffers Degradation at 200 eV and higher