Auger (AES) Depth of Information versus XPS Depth of Information

Based on XPS and Auger analyses of the Native Oxides of Silicon and Aluminum, the Depth of Information for Auger (AES) and XPS are effectively the same:  1-12 nm

Auger offers a much smaller beam size than XPS.  XPS provides at most 10 microns, while Auger provides 20 nm beam sizes.