XPS, Auger and SIMS   (PDF version)

List of terms in ISO 18115-1:2013

A
abnormal glow discharge

GDS 4.229
absolute elemental sensitivity
factor 4.415
absorption coefficient, linear 4.1
absorption coefficient, mass 4.2
absorption length
XRR 7.1
abundance sensitivity
GDMS 4.3
adventitious carbon referencing 4.4
AES 3.1
AES, angle-resolved 4.19
afterglow
GDS 4.5
aligned incidence spectrum 4.435
altered layer 4.6
AMRSF
AES, XPS 4.416
analyser blanking 4.7
analyser dispersion
energy or
mass 4.430
analyser dispersion
optical 4.431
analyser, electron energy 4.187
analyser, mass 4.294
analyser transmission
function 4.434
analysis area
sample 4.8
analysis area
spectrometer 4.9
analysis volume
sample 4.10
analysis volume
spectrometer 4.11
angle, beam convergence 4.67
angle, beam divergence 4.74
angle, critical 4.12
angle-dependent AES 4.19
angle-dependent XPS 4.21
angle, emission 4.16
angle, glancing 4.13
angle, incidence 4.17
angle lapping 4.14
angle, magic 4.15
angle of emission 4.16
angle of incidence 4.17
angle of scattering 4.18
angle-resolved AES 4.19
angle-resolved EPES 4.20
angle-resolved XPS 4.21
angle, scattering 4.18
angle, solid, of analyser 4.22
angle, solid, of detector 4.23
angle, take-off 4.24
angular distribution,
secondary-ion 4.407
anion 4.25
ANN 9.1
anode
GDS, DC operation 4.26
anode
GDS, rf operation 4.27
anode dark space
GDS 4.140
anode glow
GDS 4.28
APECS 6.1
aperture, contrast 4.29
aperture, optical 4.319
aperture, selected-area 4.411
area, analysis
sample 4.8
area, analysis
spectrometer 4.9
area, gated 4.227
area, peak 4.326
areic dose 4.175
areic dose rate 4.179
ARAES 4.19
AREPES 4.20
artificial neural network 9.1
ARXPS 4.21
Aston dark space
GDS 4.141
asymmetric charge exchange

GDS 4.101
asymmetric charge transfer

GDS 4.101
asymmetry parameter 4.30
atomic mass unit (deprecated) 4.31
atomic mixing 4.32
attenuation coefficient 4.33
attenuation coefficient, mass 4.2
attenuation length 4.34
attenuation length, effective 4.35
Auger de-excitation 4.36
Auger electron 4.37
Auger electron spectroscopy 3.1
Auger electron spectrum 4.38
Auger electron yield 4.39
Auger neutralization 4.40
Auger parameter 4.41
Auger parameter, initial-state 4.42
Auger parameter, modified 4.43
Auger photoelectron coincidence
spectroscopy 6.1
Auger process 4.44
Auger process, interatomic 4.45
Auger transition 4.46
Auger transition rate 4.47
Auger vacancy satellite 4.48
autocorrelation factor analysis,
maximum 5.8
auto scaling 5.19
average beam current 4.69
average emission function decay
length 4.151
average matrix relative sensitivity
factor
AES,XPS 4.416

B
background equivalent
concentration
GDS 4.49
background, inelastic 4.50
background, instrumental 4.51
background, metastable 4.52
background, relative standard
deviation of the 4.53
background, Shirley 4.54
background, Sickafus 4.55
background signal 4.56
background subtraction, inelastic
electron scattering 4.242
background, Tougaard 4.57
backscattered electron 4.58
backscattering coefficient
AES,
EPMA 4.63
backscattering coefficient

EIA,RBS 4.59
backscattering correction factor 7.2
backscattering energy 4.60
backscattering factor
(deprecated) 4.61backscattering
fraction 7.3
backscattering spectrum 4.62
backscattering yield
AES,
EPMA 4.63
backscattering yield
EIA,
RBS 4.59
ball cratering 4.64
Barkas-Andersen effect 7.4
Barkas effect 7.4
beam blanking 4.65
beam bunching 4.66
beam chopper 4.109
beam convergence angle 4.67
beam current 4.68
beam current, average 4.69
beam current density 4.70
beam current, integrated 4.71
beam current, pulse 4.72
beam diameter 4.73
beam divergence angle 4.74
beam energy 4.75
beam footprint
XRR 7.5
beam particle 4.76
beam, primary 4.77
beam profile 4.78
beam source energy (deprecated) 4.79
beam spill-off
XRR 7.6
Beer-Lambert law 7.7
Beer’s law 7.7
ISO/TC 201/SC 1 N 159
Page 2 of 9 pages ISO18115-1_2013_index.doc
begrenzungs effect 7.8
bias, DC
GDS 4.145
bias, self
GDS 4.145
binary elastic scattering 4.80
binary elastic scattering peak 4.81
binding energy 4.82
blocking geometry 4.83
Bohr’s critical angle 7.9
bond cleavage 4.84
bond scission 4.84
boosted glow discharge

GDS 4.230
Bragg’s rule 4.85
bremsstrahlung 4.86
bulk plasmon 4.339
buncher 7.10

C
CAE mode 4.116
carbon, adventitious,
referencing 4.4
cascade mixing 4.87
cascade, collision 4.114
cathode
GDS, DC operation 4.88
cathode
GDS, rf operation 4.89
cathode dark space
GDS 4.142
cathode drop (deprecated)

GDS 4.90
cathode fall
GDS 4.90
cathode layer
GDS 4.91
cathode, secondary
GDS 4.400
cation 4.92
cationized ion 4.93
CDP 4.115
centering 5.1
centring (deprecated) 5.1
certified reference material 4.371
channelling 4.94
characteristic electron energy
losses 4.95
characteristic X-rays 4.96
charge compensation
(deprecated) 4.98
charge exchange
GDS 4.100
charge exchange, asymmetric

GDS 4.101
charge exchange, symmetric

GDS 4.102
charge modification 4.97
charge neutralization 4.98
charge referencing 4.99
charge stabilization (deprecated) 4.98
charge transfer
GDS 4.100
charge transfer, asymmetric

GDS 4.101
charge transfer, symmetric

GDS 4.102
charging potential 4.103
charging, sample 4.392
chemical effects 4.104
chemical map 4.290
chemical shift 4.105
chemical species 4.106
chemical state of an atom
AES,
EELS, UPS, XPS 4.107
chemical-state plot
XPS 4.108
chopper, beam 4.109
chromatic aberration 4.110
cluster ion 4.111
cluster SIMS 4.112
collective motion 4.113
collision cascade 4.114
component (deprecated) 5.5
compositional depth profile 4.115
Compton scattering 7.11
concentration, background
equivalent
GDS 4.49
constant analyser energy
mode 4.116
constant DE mode 4.116
constant DE/E mode 4.117
constant retardation ratio
mode 4.117
contrast aperture 4.29
contamination, surface 4.459
cooperative uplifting 4.118
Coster-Kronig transition 4.119
counts 4.120
crater depth 4.121
crater edge effect 4.122
cratering, ball 4.64
critical angle 4.12
critical angle
XRR 7.12
CRM 4.371
Crookes’ dark space (deprecated)

GDS 4.142
cross-linker
adsorption 7.13
cross-linking
polymers 7.14
cross section 4.123
cross section, damage 4.124
cross section, disappearance 4.125
cross section, elastic
scattering 4.126
cross section, elastic scattering,
differential 4.127
cross section, enhanced
elastic 4.128
cross section, inelastic
scattering 4.129
cross section, ionization 4.130
cross section, nuclear
reaction 4.131
cross section, photoionization 4.132
cross section, Rutherford 4.133
cross section, stopping 4.134
cross section, stopping,
electronic 4.452
cross section, stopping factor 4.453
cross section, stopping,
nuclear 4.454
cross section, sub-shell
photoionization 4.135
cross section, transport 4.136
cross-sectioning 4.137
CRR mode 4.117
current, average beam 4.69
current, beam 4.68
current, integrated beam 4.71
current, pulse beam 4.72
curve resolving (deprecated) 4.329

D
Da 4.480
dalton 4.480
damage cross section 4.124
damage limit 4.138
DAPCI 6.4
DAPPI 6.2
dark space
GDS 4.139
dark space, anode
GDS 4.140
dark space, Aston
GDS 4.141
dark space, cathode
GDS 4.142
dark space, Crookes’ (deprecated)

GDS 4.142
dark space, Faraday
GDS 4.143
dark space, Hittorf (deprecated)

GDS 4.142
DART 6.3
data matrix 5.2
data matrix, reproduced 5.15
data preprocessing 5.3
data pretreatment (deprecated) 5.3
daughter ion 4.144
DC bias
GDS 4.145
DC offset
GDS 4.145
de Broglie wavelength 7.15
dead time 4.146
dead time, extended 4.147
dead time, multidetector 4.148
dead time, non-extended 4.149
decay length 4.150
decay length, average emission
function 4.151
decay length, deep emission
function 4.152
decay length, emission
function 4.153
decay length, leading edge 4.154
decay length, trailing edge 4.155
deep emission function decay
length 4.152
de-excitation, Auger 4.36
degree of ionization 4.156
delayed onset 4.57
delta layer 4.158
Page 3 of 9 pages ISO18115-1_2013_index.doc
dendrimer 4.159
deprotonated ion 4.160
depth, crater 4.121
depth distribution function,
emission 4.161
depth distribution function,
excitation 4.162
depth, information 4.246
depth, mean escape 4.203
depth profile 4.350
depth profile, compositional 4.115
depth profile, image 4.239
depth profile, sputter 4.440
depth profiling 4.163
depth resolution 4.164
depth resolution, instrumental
AES,
SIMS, XPS 4.165
depth resolution, instrumental

MEIS, RBS 4.166
depth resolution parameter 4.167
DESI 3.2
desorption atmospheric pressure
chemical ionization 6.4
desorption atmospheric pressure
photoionization 6.2
desorption electrospray
ionization 3.2
detection efficiency,
instrumental 4.250
detection limit 4.168
detector efficiency 4.169
detector, solid angle of 4.23
DFA 5.4
diameter, beam 4.73
differential elastic scattering cross
section 4.127
differential electron elastic reflection
coefficient 4.170
differential spectrum 4.171
diffuse XRR 6.13
diffusion, radiation-enhanced 4.359
diffusion, radiation-induced 4.359
digital gate 4.225
dilute limit 4.172
direct analysis in real time 6.3
direct recoil spectroscopy 6.5
direct spectrum 4.173
discriminant analysis 5.4
discriminant function analysis 5.4
disappearance cross section 4.125
dispersion, analyser
energy or
mass 4.430
dispersion, analyser
optical 4.431
dispersion plane
XRR 7.16
dispersion, spectrometer
energy or
mass 4.430
dispersion, spectrometer

optical 4.431
dose 4.174
dose, areic 4.175
dose density (deprecated) 4.175
dose, implanted areic 4.176
dose, nominal areic 4.177
dose, non-implanted areic 4.178
dose rate, areic 4.179
dose, received areic 4.180
dose, retained areic 4.181
dose, sputtered areic 4.182
DRS 6.5
dual-beam profiling 4.183
dynamic emittance matching 4.184
dynamic SIMS 3.3

E
EESI 6.7
effective attenuation length 4.35
efficiency 4.185
efficiency, detector 4.169
efficiency, instrumental
detection 4.250
eigenvalue, energy 4.194
Einstein’s (photoelectric)
equation 7.17
elastic peak 4.186
elastic peak electron
spectroscopy 3.4
elastic recoil detection 6.5
elastic recoil detection analysis 6.5
elastic scattering 4.80
elastic scattering cross section 4.126
elastic scattering peak, binary 4.81
elastic scattering, binary 4.80
ELDI 6.6
electrode sheath
GDS 4.424
electron, backscattered 4.58
electron energy analyser 4.187
electron energy loss spectrum 4.197
electron energy losses,
characteristic 4.95
electron flooding 4.188
electron impact excitation

GDS 4.204
electron impact ionization

GDS 4.274
electron inelastic mean free
path 4.243
electron, primary 4.346
electron, primary
GDS 4.347
electron retardation 4.189
electron, secondary 4.401
electron, secondary
GDS 4.402
electron spectrometer 4.190
electron spectroscopy for chemical
analysis (deprecated) 3.5
electronic gate 4.226
electronic relaxation 4.379
electronic stopping cross
section 4.452
electrons, thermalized
GDS 4.470
electrons, ultimate (deprecated)
<GDS> 4.470
electrospray laser desorption
ionization mass spectrometry 6.6
elemental map 4.291
elemental relative sensitivity factor

AES, TXRF, XPS 4.419
elemental relative sensitivity factor

dynamic SIMS 4.420
emission angle 4.16
emission depth distribution
function 4.161
emission function decay
length 4.153
emission yield 4.191
energy acceptance window 4.192
energy, backscattering 4.60
energy, beam 4.75
energy, binding 4.82
energy distribution, secondaryion
4.408
energy edge 4.193
energy eigenvalue 4.194
energy, Fermi 4.211
energy, impact 4.195
energy, kinetic 4.278
energy, Koopmans 4.280
energy loss 4.196
energy loss spectrum,
electron 4.197
energy losses, characteristic
electron 4.95
energy of incident beam
(deprecated) 4.198
energy, orbital 4.320
energy, pass 4.325
energy, peak 4.327
energy per channel 4.199
energy, relaxation 4.380
energy, resolution 4.384
energy, scattered-ion 4.394
energy, screening 4.381
energy, surface
approximation 4.200
enhanced elastic cross section 4.128
enhancement factor 4.201
EPES 3.4
EPES, angle-resolved 4.20
equilibrium surface composition
sputtering 4.442
ERD 6.5
ERDA 6.5
erosion rate 4.202
ESCA (deprecated) 3.5
escape depth, mean 4.203
étendue, spectrometer 4.432
Page 4 of 9 pages ISO18115-1_2013_index.doc
EXAFS 6.8
exchange splitting 4.313
excitation depth distribution
function 4.162
excitation, electron impact

GDS 4.204
excited state 4.205
experimental scattered-ion
intensity 4.396
extended dead time 4.147
extended X-ray absorption fine
structure spectroscopy 6.8
extra-atomic relaxation
energy 4.381
extraction bias 4.206
extraction field 4.207
extraction field, pulsed 4.356
extractive electrospray
ionisation 6.7
extractor voltage 4.208
F
FAB (deprecated) 3.6
FABMS 3.6
FAB-SIMS 4.209
factor 5.5
factor analysis 5.6
factor, backscattering 4.61
fall potential
GDS 4.90
Fano plot 7.18
Faraday cup 4.210
Faraday dark space
GDS 4.143
fast atom bombardment mass
spectrometry 3.6
fast atom bombardment
SIMS 4.209
FAT mode 4.116
Fermi energy 4.211
Fermi level 4.211
Fermi level referencing 4.212
FIB 4.213
field-induced migration 4.214
final state 4.215
fixed analyser transmission
mode 4.116
fixed retardation ratio mode 4.117
floating potential
GDS 4.216
fluence
for a parallel beam of
particles 4.217
fluence
for particles moving in many
directions 4.218
fluorescence 4.219
fluorescence yield 4.220
flux 4.221
focussed ion beam system 4.213
fractional ion yield 4.269
fractional sputtering yield 4.446
fragment ion 4.222
fragment, polyatomic 4.340
fragmentation 4.223
free radical (deprecated) 4.360
frozen-orbital approximation 4.224
FRR mode 4.117
G
g index 7.20
G-SIMS-FPM 7.19
G-SIMS with fragmentation pathway
mapping 7.19
gate, digital 4.225
gate, electronic 4.226
gate, optical (deprecated) 4.319
gated area 4.227
GDMS 3.8
GDOES 3.9
GDS 3.10
GISAXS 6.9
glancing angle 4.13
glancing exit 4.235
glancing incidence 4.236
glow discharge 4.228
glow discharge, abnormal

GDS 4.229
glow discharge, boosted

GDS 4.230
glow discharge mass
spectrometry 3.8
glow discharge, normal

GDS 4.231
glow discharge optical emission
spectrometry 3.9
glow discharge, pulsed
GDS 4.232
glow discharge source, jet-assisted

GDS 4.233
glow discharge source, jet-enhanced

GDS 4.233
glow discharge spectrometry 3.10
glow region (deprecated)

GDS 4.314
gold decoration 4.234
grazing exit 4.235
grazing incidence 4.236
grazing-incidence small-angle X-ray
scattering 6.9
G-SIMS 3.7
H
heavy ion 7.21
heavy particle
ion analysis 7.22
Hittorf dark space (deprecated)

GDS 4.142
hole 4.237
hole state 4.238
hole, spectator 4.429
I
IBA 3.11
image (deprecated) 4.289
image depth profile 4.239
impact energy 4.195
impact energy per ion 4.240
implantation, ion 4.263
implanted areic dose 4.176
incidence angle 4.17
incident-particle energy 4.241
inelastic background 4.50
inelastic electron scattering
background subtraction 4.242
inelastic mean free path,
electron 4.243
inelastic scattering 4.244
inelastic scattering cross
section 4.129
information area 4.245
information depth 4.246
information radius 4.247
infratrack 7.23
initial state
AES, EPMA 4.248
initial state
XPS 4.249
initial-state Auger parameter 4.42
instrumental background 4.51
instrumental depth resolution
AES,
SIMS, XPS 4.165
instrumental depth resolution
MEIS,
RBS 4.166
instrumental detection
efficiency 4.250
integrated beam current 4.71
intensity, peak 4.251
intensity, signal 4.252
interatomic Auger process 4.45
interface 4.253
interface core-level shift 7.24
interface width, observed 4.254
interfacial region 4.255
interference signal 4.256
intermediate-mass ion 7.25
internal carbon referencing 4.257
internal scattering 4.258
intrinsic lineshape 4.285
intrinsic linewidth
AES, UPS,
XPS 4.286
intrinsic linewidth

instrument 4.287
ion beam 4.259
ion beam analysis 3.11
ion beam induced mass
transport 4.260
ion beam ratio
GDMS 4.261
ion, cationized 4.93
ion, cluster 4.111
ion, daughter 4.144
Page 5 of 9 pages ISO18115-1_2013_index.doc
ion, deprotonated 4.160
ion-electron recombination

GDS 4.367
ion, fragment 4.222
ion image 4.262
ion implantation 4.263
ion lifetime 4.264
ion, metastable 4.300
ion, molecular 4.304
ion, molecular, deprotonated 4.305
ion, molecular, protonated 4.306
ion neutralization 4.265
ion, parent 4.322
ion, polyatomic 4.341
ion, primary 4.348
ion, probe 4.349
ion, protonated 4.353
ion-scattering spectrometer 4.266
ion-scattering spectrum 4.267
ion, secondary 4.406
ion species 4.268
ion yield, fractional 4.269
ion yield, partial 4.491
ion yield, negative 4.270
ion yield, positive 4.271
ion yield, total 4.492
ion yield, useful 4.272
ionization coefficient
(deprecated) 4.156
ionization cross section 4.130
ionization efficiency 4.273
ionization, degree of 4.156
ionization, electron impact

GDS 4.274
ionization, Penning
GDS 4.275
J
jet-assisted glow discharge source

GDS 4.233
jet-enhanced glow discharge source

GDS 4.233
jump ratio 4.276
K
Keenan scaling (deprecated) 5.13
kinematic factor 4.277
kinetic energy 4.279
knock-in 4.279
knock-on 4.279
Koopmans energy 4.280
L
LAESI 6.10
Langmuir-Blodgett film 4.281
laser desorption electrospray
ionisation 6.10
laser desorption ionisation 6.11
lateral profile 4.351
lateral resolution 4.385
layer, altered 4.6
layer, delta 4.158
LB film 4.281
LDI 6.11
leading edge decay length 4.154
LEIS(S) 3.12
length, attenuation 4.34
length, decay 4.150
length, effective attenuation 4.35
lifetime, ion 4.264
light ion 7.26
limit, detection 4.168
limit, dilute 4.172
line scan 4.282
line width (deprecated) 4.331
linear absorption coefficient 4.1
linear cascade 4.283
linear collision cascade 4.283
lineshape 4.284
lineshape, intrinsic 4.285
lineshape, natural 4.285
linewidth, intrinsic 4.286
linewidth, intrinsic

instrument 4.287
linewidth, natural 4.286
liquid-metal ion gun 4.288
LMIG 4.288
loadings 5.7
loss, energy 4.196
loss spectrum, electron
energy 4.197
losses, characteristic electron
energy 4.95
low-energy ion scattering
spectrometry 3.12
M
MAF analysis 5.8
magic angle 4.15
MALDI 3.14
MALDESI 6.12
map 4.289
map, chemical 4.290
map, elemental 4.291
mass absorption coefficient 4.2
mass accuracy 4.292
mass accuracy, relative 4.293
mass analyser 4.294
mass attenuation coefficient 4.2
mass spectrum 4.295
mass-to-charge ratio 4.296
mass transport, ion beam
induced 4.260
matrix-assisted laser desorption
electrospray ionisation 6.12
matrix-assisted laser desorption/
ionization mass
spectrometry 3.14
matrix, data 5.2
matrix effects 4.297
matrix factor 4.298
matrix, residual 5.16
maximum autocorrelation factor
analysis 5.8
MCR 5.10
mean centering 5.1
mean centring (deprecated) 5.1
mean escape depth 4.203
mean free path, electron
inelastic 4.243
mean free path, transport 4.299
medium-energy ion scattering
spectrometry 3.13
MEIS(S) 3.13
metastable background 4.52
metastable ion 4.300
migration, field-induced 4.214
mixing, atomic 4.32
mixing, cascade 4.87
mixing, zone of 4.494
modified Auger parameter 4.43
modulation 4.301
molecular fragment 4.302
molecular image 4.303
molecular ion 4.304
molecular ion, deprotonated 4.305
molecular ion, protonated 4.306
molecule, oligomer 4.318
monolayer 4.307
monolayer capacity

chemisorption 4.308
monolayer capacity

physisorption 4.309
motion, collective 4.113
multidetector dead time 4.148
multilayer 4.310
multilayer
chemisorption,
physisorption 4.311
multiplet splitting
AES 4.312
multiplet splitting
XPS 4.313
multivariate analysis 5.9
multivariate curve resolution 5.10
MVA 5.9
N
natural lineshape 4.285
natural linewidth 4.286
near-edge extended X-ray absorption
fine structure spectroscopy 6.21
negative glow
GDS 4.314
negative-ion yield 4.270
Page 6 of 9 pages ISO18115-1_2013_index.doc
neutralization, Auger 4.40
neutralization, charge 4.98
neutralization, ion 4.265
NEXAFS 6.21
noise 4.315
noise, statistical 4.316
nominal areic dose 4.177
nominal mass 4.317
non-extended dead time 4.149
non-implanted areic dose 4.178
normal glow discharge
GDS 4.231
normalization 5.11
nuclear reaction cross section 4.131
nuclear stopping cross section 4.454
O
observed interface width 4.254
off-specular XRR 6.13
oligomer molecule 4.318
optical aperture 4.319
optical gate (deprecated) 4.319
optimal scaling (deprecated) 5.13
orbital energy 4.320
overpotential 4.321
P
PADI 6.15
parent ion 4.322
partial intensity 4.323
partial intensity, reduced 4.324
partial ion sputtering yield 4.491
partial ion yield 4.491
partial least squares 5.12
partial least squares regression 5.12
partial sputtering yield 4.447
particle energy, incident 4.241
particle, beam 4.76
particle-induced X-ray
emission 6.14
pass energy 4.325
PCA 5.14
peak area 4.326
peak, elastic 4.186
peak energy 4.327
peak fitting 4.328
peak intensity 4.251
peak, quasi-elastic 4.186
peak synthesis 4.329
peak-to-background ratio 4.330
peak width 4.331
Penning ionization
GDS 4.275
PERSF
AES, XPS 4.417
photoelectric effect 4.332
photoelectric work function 7.27
photoelectron X-ray satellite
peaks 4.333
photoelectron X-ray satellite
subtraction 4.334
photoemission 4.335
photoionization cross section 4.132
photoionization cross section,
sub-shell 4.135
pileup 4.336
PIXE 6.14
plasma
GDS 4.337
plasma assisted desorption
ionisation 6.15
plasma potential
GDS 4.338
plasmon 4.339
plasmon, bulk 4.339
plasmon, extrinsic 7.28
plasmon, intrinsic 7.29
plasmon, surface 4.462
plasmon, volume 4.339
PLS 5.12
PLSR (deprecated) 5.12
Poisson scaling 5.13
polyatomic fragment 4.340
polyatomic ion 4.341
polymer repeat unit 4.382
positive column
GDS 4.342
positive-ion yield 4.271
post-acceleration detector
voltage 4.343
post-acceleration voltage 4.343
potential, charging 4.103
potential, floating
GDS 4.216
potential, plasma
GDS 4.338
potential, sheath
GDS 4.425
potential, space
GDS
(deprecated) 4.338
preburn
GDS, bulk materials 4.344
preburning
GDS, bulk
materials 4.345
preferential sputtering 4.443
preprocessing, data 5.3
presputtering
GDS, bulk
materials 4.345
presputtering period
GDS, bulk
materials 4.344
primary beam 4.77
primary electron 4.346
primary electron
GDS 4.347
primary ion 4.348
principal component (deprecated) 5.5
principal-component spectrum
(deprecated) 5.7
principal-component analysis 5.14
probe ion 4.349
profile, beam 4.78
profile, depth 4.350
profile, lateral 4.351
profile, vertical 4.350
profiling, dual-beam 4.183
projected range 4.352
projections (deprecated) 5.21
protonated ion 4.353
pulse beam current 4.72
pulse rate 4.354
pulse width 4.355
pulsed extraction field 4.356
pulsed glow discharge
GDS 4.232
pure component (deprecated) 5.5
pure-component concentration
(deprecated) 5.21
pure-component spectrum
(deprecated) 5.7
pure-element relative sensitivity
factor
AES, XPS 4.417
Q
quantitative analysis 4.357
quasi-elastic peak 4.186
R
radial sectioning 4.358
radiation-enhanced diffusion 4.359
radiation-induced diffusion 4.359
radiative recombination

GDS 4.368
radical 4.360
radical ion 4.361
random incidence spectrum 4.436
random raster 4.362
range, projected 4.352
range straggling 4.363
range, transverse 4.477
raster 4.364
raw-data file 4.365
RBS 3.15
reactive DESI 6.16
received areic dose 4.180
recoil effect 4.366
recoil implantation 4.279
recombination
GDS 4.367
recombination, ion-electron

GDS 4.367
recombination, radiative

GDS 4.368
redeposition 4.369
reduced partial intensity 4.324
REELS 3.16
reference material 4.370
reference material, certified 4.371
reference method 4.372
referencing, adventitious
carbon 4.4
referencing, charge 4.99
referencing, Fermi level 4.212
referencing, internal carbon 4.257
referencing, vacuum level 4.484
Page 7 of 9 pages ISO18115-1_2013_index.doc
reflection electron energy loss
spectroscopy 3.16
reflector voltage 4.373
reflectron 4.374
relative instrument spectral response
function 4.375
relative isotopic sensitivity
factor 4.421
relative mass accuracy 4.293
relative resolution of a
spectrometer 4.376
relative sensitivity factor

GDMS 4.418
relative sputtering rate 4.377
relaxation 4.378
relaxation, electronic 4.379
relaxation energy 4.380
relaxation energy, extraatomic
4.381
relaxation, electronic 4.379
repeat unit, polymer 4.382
repetition rate 4.383
reproduced data matrix 5.15
residual matrix 5.16
resolution, depth 4.164
resolution, depth, instrumental
AES,
SIMS, XPS 4.165
resolution, depth, instrumental

MEIS, RBS 4.166
resolution, energy 4.384
resolution, lateral 4.385
resolution of a spectrometer 4.386
resolution, spectrometer 4.386
resolution, system 4.387
resolving power of a
spectrometer 4.388
resonance reaction 4.389
response function,
spectrometer 4.433
retained areic dose 4.181
retardation, electron 4.189
RISR 4.375
RM 4.370
RSF
GDMS 4.418
Rutherford backscattering
spectrometry 3.15
Rutherford cross section 4.133
S
SALDI 6.18
SAM 4.413
sample area viewed by the
analyser 4.390
sample bias 4.391
sample charging 4.392
sample voltage 4.393
samples 5.17
satellite, Auger vacancy 4.48
SAXS 3.18
scaling 5.18
scaling, auto 5.19
scaling, Poisson 5.13
scaling, variance 5.20
scattered-ion energy 4.394
scattered-ion energy ratio 4.395
scattered-ion intensity,
experimental 4.396
scattered-ion intensity,
theoretical 4.397
scattering angle 4.18
scattering, binary elastic 4.80
scattering, elastic 4.80
scattering, inelastic 4.244
scattering, internal 4.258
scattering peak, binary elastic 4.81
scattering vector
XRR 7.30
scores 5.21
screening 4.398
screening energy 4.381
screening function 4.399
SDP 4.440
secondary cathode
GDS 4.400
secondary electron 4.401
secondary electron
GDS 4.402
secondary-electron emission
coefficient
AES, EPMA 4.403
secondary-electron emission
coefficient
GDS, SIMS 4.404
secondary-electron yield
AES,
EPMA 4.403
secondary-electron yield
GDS,
SIMS 4.404
secondary-electron yield,
total 4.405
secondary ion 4.406
secondary-ion angular
distribution 4.407
secondary-ion energy
distribution 4.408
secondary-ion mass
spectrometry 3.17
secondary-ion yield 4.409
sectioning, radial 4.358
segregation 4.410
segregation, surface 4.463
selected-area aperture 4.411
self bias
GDS 4.145
self-absorption
GDOES 4.412
self-assembled monolayer 4.413
self-modelling curve resolution
(deprecated) 5.10
self-modelling mixture analysis
(deprecated) 5.10
self-reversal
GDOES 4.414
sensitivity factor, absolute
elemental 4.415
sensitivity factor, average matrix
relative
AES, XPS 4.416
sensitivity factor, pure-element
relative
AES, XPS 4.417
sensitivity factor, relative

GDMS 4.418
sensitivity factor, elemental relative

AES, XPS, TXRF 4.419
sensitivity factor, elemental relative

dynamic SIMS 4.420
sensitivity factor, relative isotopic

dynamic SIMS 4.421
sensitivity, abundance
GDMS 4.3
SEP 4.461
SEXAFS 6.19
shakeoff 4.422
shakeup 4.423
sheath
GDS 4.424
sheath potential
GDS 4.425
Shirley background 4.54
shots per pixel 4.426
Sickafus background 4.55
signal intensity 4.252
signal-to-background ratio 4.330
signal-to-noise ratio 4.427
SIMS 3.17
SIMS, dynamic 3.3
SIMS, FAB- 4.209
SIMS, G- 3.7
SIMS, static 3.20
SMCR (deprecated) 5.10
SMMA (deprecated) 5.10
small-angle X-ray scattering 3.18
smoothing 4.428
SNMS 3.19
solid angle of analyser 4.22
solid angle of detector 4.23
space potential (deprecated)

GDS 4.338
spectator hole 4.429
spectrometer dispersion
energy or
mass 4.430
spectrometer dispersion

optical 4.431
spectrometer étendue 4.432
spectrometer resolution 4.386
spectrometer response
function 4.433
spectrometer transmission
function 4.434
spectrometer, electron 4.190
spectrometer, ion-scattering 4.266
spectrometer, relative resolution
of a 4.376
spectrometer, resolution of a 4.386
spectrometer, resolving power
of a 4.388
spectrum, aligned incidence 4.435
spectrum, random incidence 4.436
Page 8 of 9 pages ISO18115-1_2013_index.doc
specular XRR 6.17
spike 4.437
spike, thermal 4.469
spin coating 4.438
spin orbit splitting 4.439
sputter depth profile 4.440
sputtered areic dose 4.182
sputtered neutral mass
spectrometry 3.19
sputtering 4.441
sputtering, equilibrium surface
composition 4.442
sputtering, preferential 4.443
sputtering rate 4.444
sputtering rate, relative 4.377
sputtering, steady-state
AES, GDS,
SIMS 4.449
sputtering, stoichiometric
AES,
GDS, SIMS 4.450
sputtering yield 4.445
sputtering yield, fractional 4.446
sputtering yield, partial 4.447
sputtering yield, partial ion 4.491
standard vacuum level 4.485
state, excited 4.205
state, final 4.215
state, initial
AES, EPMA 4.248
state, initial
XPS 4.249
static limit 4.448
static SIMS 3.20
statistical noise 4.316
steady-state sputtering
AES, GDS,
SIMS 4.449
stoichiometric sputtering
AES, GDS,
SIMS 4.450
stop event 4.451
stopping cross section 4.134
stopping cross section,
electronic 4.452
stopping cross section factor 4.453
stopping cross section,
nuclear 4.454
stopping force 4.455
stopping power 4.455
straggling, range 4.363
straggling, transverse 4.478
sub-shell photoionization cross
section 4.135
sum rule
dielectric function 4.456
super Coster-Kronig
transition 4.457
surface 4.458
surface-assisted laser
desorption/ionization 6.18
surface contamination 4.459
surface core-level shift 7.31
surface coverage 4.460
surface energy
approximation 4.200
surface excitation parameter 4.461
surface extended X-ray absorption
fine structure spectroscopy 6.19
surface plasmon 4.462
surface segregation 4.463
surfactant 4.464
swift ion 7.32
symmetric charge exchange

GDS 4.102
symmetric charge transfer

GDS 4.102
synchrotron radiation 4.465
synthesis, peak 4.329
system resolution 4.387
T
take-off angle 4.24
target 4.466
target, thick 4.467
target, thin 4.468
tethering 7.33
theoretical scattered-ion
intensity 4.397
thermal spike 4.469
thermalized electrons
GDS 4.470
thermionic work function 7.34
thick target 4.467
thin film 4.471
thin target 4.468
time constant 4.472
time of flight 4.473
topographic contrast 4.474
total ion yield 4.492
total reflection 4.475
total reflection X-ray fluorescence
spectroscopy 3.21
total secondary-electron yield 4.405
Tougaard background 4.57
trailing edge decay length 4.155
transformation 5.22
transformation probability 4.476
transition, Auger 4.46
transition, Coster-Kronig 4.119
transition rate, Auger 4.47
transition, super Coster-
Kronig 4.457
transmission function,
spectrometer 4.434
transport cross section 4.136
transport mean free path 4.299
transverse range 4.477
transverse straggling 4.478
TXRF 3.21
U
u 4.480
ultimate electrons
GDS
(deprecated) 4.470
ultra-shallow depth profile 4.479
ultra-violet photoelectron
spectroscopy 3.22
ultratrack 7.35
unified atomic mass unit 4.480
unimolecular dissociation 4.481
uplifting, cooperative 4.118
UPS 3.22
useful ion yield 4.272
useful spatial resolution 4.482
V
vacuum level 4.483
vacuum level referencing 4.484
vacuum level, standard 4.485
valence-band spectrum 4.486
variables 5.23
variance scaling 5.20
vertical profile 4.350
volume, analysis
sample 4.10
volume, analysis
spectrometer 4.11
volume plasmon 4.339
volume yield 4.493
W
Wagner plot
XPS 4.108
wave vector
XRR 7.36
weighting 5.18
work function 4.487
work function, thermionic 7.34
X
XAFS 6.20
XANES 6.21
XPS 3.23
XPS, angle-resolved 4.21
X-ray absorption fine structure
spectroscopy 6.20
X-ray absorption near-edge
spectroscopy 6.21
X-ray ghost line 4.488
X-ray linewidth 4.489
X-ray monochromator 4.490
X-ray photoelectron
spectroscopy 3.23
X-ray reflectometry 6.22
X-ray satellite peaks,
photoelectron 4.333
X-ray satellite subtraction,
photoelectron 4.334
X-ray standing waves 6.23
X-rays, characteristic 4.96
XRR 6.22
XSW 6.23
Page 9 of 9 pages ISO18115-1_2013_index.doc
Y
yield, Auger electron 4.39
yield, backscattering
AES,
EPMA 4.63
yield, backscattering
EIA,
RBS 4.59
yield, emission
GDOES 4.191
yield, fluorescence 4.220
yield, fractional ion 4.269
yield, sputtering, fractional 4.446
yield, negative ion 4.270
yield, partial ion 4.491
yield, partial sputtering 4.447
yield, positive ion 4.271
yield, secondary-electron
AES,
EPMA 4.403
yield, secondary-electron
GDS,
SIMS 4.404
yield, secondary-ion 4.409
yield, sputtering 4.445
yield, total ion 4.492
yield, total secondaryelectron
4.405
yield, useful ion 4.272
yield, volume 4.493
Z
zone of mixing 4.494