Adsorbed gases (CO2, O2, H2O) |
XPS after SEM |
After baking |
Anode induced ghost |
Anode lifetime |
Baking effects |
Conductive tape |
Conductive tape – not so conductive – insulating |
Contamination spread |
Data analysis |
Data artefacts (ghost, spike, …) |
Data processing |
Depth profiling |
Double side tape |
Dropped sample |
Electron gun lifetime |
Filaments |
Hardware problems |
Hardware troubleshooting |
Instrument baking |
Instrument calibration |
Ion beam degradation |
Ion beam induced mixing |
Leak checking |
Leaks |
|
Magnetic lens – effect on AR-XPS |
Multi-technique surface analysis |
Need beam alignment |
Need column alignment |
Need crystal alignment |
Oxide buildup on lens – Au coat to solve |
Peak overlaps – Al over Cu, Sb over O etc. |
Peak overlaps – auger on XPS |
Peak overlaps – non-mono satellites |
Polymer to graphite after Ar+ etch |
Potential breakage of mono crystals |
Preferential sputtering |
Scotch brand Invisible tape |
SEM last – carbon buildup |
Software troubleshooting |
Surface migration |
Tapes in vacuum |
ToF-SIMS – after XPS |
Virtual vacuum leaks |