ToF-SIMS  Depth of Information versus XPS Depth of Information

 

Time-of-Flight SIMS has a Depth of Information ranging from
3-6 angstroms that depends on Mass of Element Ionized,
Angle of Incidence, Acceleration Voltage, Ion Flux, and Cluster size

 

XPS Depth of Information depends on X-ray Source Energy, Atomic Number of Element, IMFP (KE), collection angle of Electron Lens, and Electron Take-off-Angle:    10-120 angstroms

ToF-SIMS Depth of Information depends on Mass of Element Ionized, Angle of Incidence, Acceleration Voltage, Ion Flux, and Cluster Size:      3-6 angstroms Â