ToF-SIMS Depth of Information versus XPS Depth of Information
Time-of-Flight SIMS has a Depth of Information ranging from
3-6 angstroms that depends on Mass of Element Ionized,
Angle of Incidence, Acceleration Voltage, Ion Flux, and Cluster size
XPS Depth of Information depends on X-ray Source Energy, Atomic Number of Element, IMFP (KE), collection angle of Electron Lens, and Electron Take-off-Angle: 10-120 angstroms
ToF-SIMS Depth of Information depends on Mass of Element Ionized, Angle of Incidence, Acceleration Voltage, Ion Flux, and Cluster Size: 3-6 angstroms
