Bad Data Examples

 

 

Ion Beam Cleaning – Degraded Chemistry of Polymer

Degraded Chemistry example shows the effect of mild mono-atomic Ar+ ion etching on a Polymer.  If a cluster Ar+ source of Ar+ ions had been used, there would have been no degradation or very little.

 

 

 

Poor Charge Control (Flood Gun OFF)

 

 

 

Poor Energy Resolution (Si wafer sample) and Poor Charge Control (PET sample)

 

 

 

 

Differential Charging – Flood Gun was Off – Signal Decreased

 

 

 

 

After Normalizing the Two Survey Spectra