Bad Data Examples
Ion Beam Cleaning – Degraded Chemistry of Polymer
Degraded Chemistry example shows the effect of mild mono-atomic Ar+ ion etching on a Polymer. If a cluster Ar+ source of Ar+ ions had been used, there would have been no degradation or very little.
Poor Charge Control (Flood Gun OFF)
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Poor Energy Resolution (Si wafer sample) and Poor Charge Control (PET sample)
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Differential Charging – Flood Gun was Off – Signal Decreased
After Normalizing the Two Survey Spectra