Tests of RSFs


Test of Scofield RSFs using Single Crystals (exposed bulk) and Pure PDMS

These results from exposed bulk of single crystals show that there are discrepancies when we integrate XPS peaks using the most common method of integrating only the main XPS peak.  If we use “Modified Scofield RSFs” in place of the “Standard Scofield RSFs”, then we can greatly improve the accuracy of the Atom% values measured from only the main XPS peaks.  An extensive study using single crystals is currently underway to produce improved Atom% by producing “Modified Scofield RSFs” derived from bulk analysis of single crystals.



Comparison of Ulvac-PHI ASFs to Scofield SFs

after normalizing Ulvac-PHI ASFs so that ASF of C (1s) = 1.0