Depth of Information
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Depth of Information (see chart below)
  • X-ray photoelectron spectroscopy (XPS)
  • Auger electron spectroscopy (AES)
  • Dynamic SIMS (D-SIMS)
  • Energy dispersive X-ray spectroscopy (EDX)
  • Infrared spectroscopy (FT-IR)
  • Raman spectroscopy
  • Scanning electron microscopy image information depth (SEM)
  • Time-of-Flight SIMS (ToF-SIMS)
  • X-ray fluorescence spectroscopy (XRF)
Vince's 3D Cyclinders - Sm Beam Size and Depth of Information v8 with less numbers

Depth of Electron Penetration = Depth of X-ray Emission

Electrons IN :  X-rays OUT

This chart (Monte Carlo simulation) shows the depth from which X-rays are emitted when excited by electron beams having 5 kV, 10 kV, 15 kV and 20 kV acceleration potential.

The total depth being probed was defined to be 1,000 nm (10,000 ang). Results from five (5) elements were calculated, with atom numbers (Z#) ranging from 6 to 79.





Vince's 3D Cyclinders - Sm Beam Size and Depth of Information v8 with less numbers