Ion Etching Variables

  • Angle effects
  • Argon vs Xenon ions
  • Compucentric rotation
  • Crater edge effects
  • Etch calibration
  • Etch rates
  • Interface resolution
  • Ion beam alignment
  • Leak check
  • Knock-in effect
  • Mild surface cleaning
  • Re-deposition
  • Relative etch rates
  • Rotation based profiling
  • Stainless steel tubing not plastic
  • Surface reconstruction
  • Zalar rotation

 

 

Example of Cleaning Metal Surface using Argon Ion Etching using an Auger Instrument