XPS, Auger and SIMS   (PDF version) List of terms in ISO 18115-1:2013 A abnormal glow discharge GDS 4.229 absolute elemental sensitivity factor 4.415 absorption coefficient, linear 4.1 absorption coefficient, mass 4.2 absorption length XRR 7.1 abundance sensitivity GDMS 4.3 adventitious carbon referencing 4.4 AES 3.1 AES, angle-resolved 4.19 afterglow GDS 4.5 aligned incidence spectrum 4.435 […]

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